Affiliation:
1. State Key Laboratory of Molecular Engineering of Polymers Department of Macromolecular Science Fudan University Shanghai 200433 China
2. Laboratory of Molecular Materials and Devices Fudan University Shanghai 200433 China
3. Research Center for Life Sciences Computing Zhejiang Lab Hangzhou 311100 China
4. Key Laboratory of Environmentally Friendly Chemistry and Applications of Ministry of Education College of Chemistry Xiangtan University Xiangtan 411105 P. R. China
Abstract
AbstractSemiconducting photoresists hold great promise for scale‐up manufacturing of organic field‐effect transistors (OFETs) for integrated organic electronics. While photolithographic p‐type OFETs have achieved a considerable balance among patterning precision, electrical properties and process stability, it remains challenging for n‐type OFETs due to the inherent limited mobility and ambient instability. Herein, a n‐type semiconducting photoresist (SPr) is developed that is compatible with photolithography procedures. By utilizing the solvent‐driven force, a self‐encapsulated blend film with gradient semiconductor phase is prepared, where the underneath transistor active layer is protected by the upper cross‐linked network, avoiding solvent erosion and air doping. As such, a mobility up to 1.1 cm2 V−1 s−1 that is comparable with amorphous Si is achieved, with remained mobility by ≈90% after long‐term exposure to developer and stripper or atmospheric conditions. The sub‐micrometer patterning accuracy of SPr enables the fabrication of organic transistor arrays with a density of 9 × 105 units cm−1, which is comparable to other state‐of‐the‐art devices fabricated by the printing or photolithography, demonstrating immense potential in integrated organic electronics.
Funder
National Key Research and Development Program of China
State Key Laboratory of Molecular Engineering of Polymers
Fudan University
Program of Shanghai Academic Research Leader
National Natural Science Foundation of China