1. The Interdisciplinary Research Center Shanghai Advanced Research Institute Chinese Academy of Sciences 99 Haike Road, Zhangjiang Hi‐Tech Park Pudong Shanghai 201210 China
2. School of Microelectronics University of Chinese Academy of Sciences 19 Yuquan Road Beijing 100049 China
3. Division of Interfacial Water and Key Laboratory of Interfacial Physics and Technology Shanghai Institute of Applied Physics Chinese Academy of Sciences Jiading Shanghai 201800 China
4. Research Center for New Energy Technology Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Jiading Shanghai 201800 China
5. Jinneng Clean Energy Technology Ltd 533 Guang'an Street Jinzhong 030600 China
6. Dalian National Laboratory for Clean Energy Dalian 116023 China