Low-temperature direct bonding of poly(methyl methacrylate) for polymer microchips

Author:

Shinohara Hidetoshi,Mizuno Jun,Shoji Shuichi

Publisher

Wiley

Subject

Electrical and Electronic Engineering

Reference11 articles.

1. , , . Proceedings of 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS2005). Boston, MA; 2005.

2. , , , , , , , . Fabrications of micro-channel device by hot emboss and direct bonding of PMMA. Proceedings of the 2004 International Conference on MEMS, NANO, and Smart Systems, Banff, Canada; 2004; 26–29.

3. Applications of Atmospheric-Pressure Glow Plasma: Practical Uses of the Atmospheric-Pressure Plasma Processing Unit "Aiplasma"

4. , , , , , , , , . Cyclo-olefin polymer direct bonding using low temperature plasma activation bonding. Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems, Seoul, Korea; 2005; 1346–1349.

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