Ion composition of a multicomponent beam plasma formed by electron‐beam evaporation of a boron‐containing target in medium vacuum
Author:
Affiliation:
1. Laboratory of Plasma Sources High Current Electronics Institute Russian Academy of Sciences Tomsk 634055 Russia
2. Department of Physics Tomsk State University of Control Systems and Radioelectronics Tomsk 634050 Russia
Funder
Russian Science Foundation
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/ppap.202000057
Reference18 articles.
1. Mechanical properties of boron films
2. Mechanical properties of boron nitride thin films prepared by atomic layer deposition
3. Effect of self-bias on the elemental composition and neutron absorption of boron carbide films deposited by RF plasma enhanced CVD
4. Fusion reactions initiated by laser-accelerated particle beams in a laser-produced plasma
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1. Determination of the degree of ionization of vapors of conducting and dielectric materials during electron-beam evaporation in the forevacuum range of pressure;Vacuum;2023-02
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