Development of a novel plasma probe for the investigation and control of plasma‐enhanced chemical vapor deposition coating processes
Author:
Affiliation:
1. Plasma Technology and Surfaces Fraunhofer Institute for Manufacturing Technology and Advanced Materials Bremen Germany
2. Sensing System Research Center National Institute of Advanced Industrial Science and Technology (AIST) Tosu Saga Japan
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/ppap.202000077
Reference39 articles.
1. Creation and Evaluation of Construction Guidelines Using CFD for Low Pressure Plasma Gas Feed-in Systems to Homogenize the Precursor Gas Flow
2. Plasmapolymeric Coating Protects Elastomers against Wear
3. D.Paulkowski K.Vissing R.Wilken 13th Int. Conf. Plasma Surface Engineering 2012 76.
4. Dental implants coated with a durable and antibacterial film
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