Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO <sub> <i>x</i> </sub> thin films on PDMS-Reference-Cited by-同舟云学术

Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO _x thin films on PDMS

Published:2022-01-22 Issue:4 Volume:19 Page:2100174
ISSN:1612-8850
Container-title:Plasma Processes and Polymers
language:en
Short-container-title:Plasma Processes & Polymers

Author:

Hoppe Christian¹,Mitschker Felix²,Mai Lukas³,Liedke Maciej Oskar⁴,Arcos Teresa¹^ORCID,Awakowicz Peter²,Devi Anjana³,Attallah Ahmed Gamal⁴^ORCID,Butterling Maik⁴,Wagner Andreas⁴,Grundmeier Guido¹^ORCID

Affiliation:

1. Technical and Macromolecular Chemistry University of Paderborn Paderborn Germany

2. Electrical Engineering and Plasma Technology Ruhr University Bochum Bochum Germany

3. Inorganic Materials Chemistry Ruhr University Bochum Bochum Germany

4. Institute of Radiation Physics Helmholtz‐Zentrum Dresden—Rossendorf Dresden Germany

Funder

Deutsche Forschungsgemeinschaft

Helmholtz Association

Publisher

Wiley

Subject

Polymers and Plastics,Condensed Matter Physics

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/ppap.202100174

Reference60 articles.

1. Thin film encapsulation for flexible AM-OLED: a review

2. Advances in high permeability polymeric membrane materials for CO2separations

3. Filler-polymer combination: a route to modify gas transport properties of a polymeric membrane

4. In situ fabrication of MOF nanoparticles in PDMS membrane via interfacial synthesis for enhanced ethanol permselective pervaporation

5. A recent progress in thin film composite membrane: A review

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. PECVD and PEALD on polymer substrates (part II): Understanding and tuning of barrier and membrane properties of thin films;Plasma Processes and Polymers;2023-11-27

2. PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth;Plasma Processes and Polymers;2023-10-30

3. Complementary spectroscopic and electrochemical analysis of the sealing of micropores in hexamethyldisilazane plasma polymer films by Al₂O₃ atomic layer deposition;Surface and Interface Analysis;2023-09-18

4. A practical and cost-effective method to make permanently bonded acoustofluidic chips reconfigurable;Microfluidics and Nanofluidics;2022-08-29

5. Nanoporous SiOx plasma polymer films as carrier for liquid‐infused surfaces;Plasma Processes and Polymers;2022-04-22