1. Graduate School of Engineering Science; Osaka University; 1-3 Machikaneyama Toyonaka Osaka 560-8531 Japan
2. PRESTO, JST; 4-1-8 Honcho Kawaguchi Saitama 332-0012 Japan
3. GlobalWafers Japan Co., Ltd.; 6-861-5 Higashikou Seirou-machi, Kitakanbara-gun Niigata 957-0197 Japan