Homoepitaxial growth of β-Ga2O3layers by metal-organic vapor phase epitaxy

Author:

Wagner Guenter1,Baldini Michele12,Gogova Daniela1,Schmidbauer Martin1,Schewski Robert1,Albrecht Martin1,Galazka Zbigniew1,Klimm Detlef1,Fornari Roberto1

Affiliation:

1. Leibniz Institute for Crystal Growth; Max-Born-Str. 2 12489 Berlin Germany

2. CNR-IMEM; Parco Area delle Scienze 37/A 43124 Parma Italy

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

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3. Resistive and ballistic phonon transport in β - Ga2O3;Physical Review B;2024-08-14

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5. Effects of Process Parameters on $\mathrm{G}{\mathrm{a}}_2{\mathrm{O}}_3$ Fabricated by MBE, HVPE, and MOCVD;2024 International Conference on Integrated Circuits, Communication, and Computing Systems (ICIC3S);2024-06-08

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