1. Brandenburg University of Technology Erich-Weinert-Str. 1 03046 Cottbus Germany
2. IHP Microelectronics PF 1466 15204 Frankfurt (Oder) Germany
3. CIS Research Institute of Microsensorics Konrad-Zuse-Str. 14 99099 Erfurt Germany
4. Institute of MicroelectronicsVienna University of Technology Gußhausstr. 27-29 1040 Vienna Austria
5. Global TCAD Solutions Bösendorferstr. 1/12 1010 Vienna Austria