Where is the limit? Yield strength improvement in silicon micro-structures by surface treatments-Reference-Cited by-同舟云学术

Where is the limit? Yield strength improvement in silicon micro-structures by surface treatments

Published:2015-10-07 Issue:1 Volume:213 Page:102-107
ISSN:1862-6300
Container-title:physica status solidi (a)
language:en
Short-container-title:Phys. Status Solidi A

Author:

Schifferle Andreas¹,Bandi Tobias²,Neels Antonia³,Dommann Alex⁴

Affiliation:

1. Helbling Technik AG; Schachenallee 29, 5000 Aarau Switzerland

2. EPFL, Swiss Space Center; 1015 Lausanne Switzerland

3. EMPA; Überlandstrasse 129, 8600 Dübendorf Switzerland

4. EMPA; Lerchenfeld Str. 5, 9014 St. Gallen Switzerland

Funder

Swiss Federal Institute of Technology Zurich

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference38 articles.

1. Scale effects for strength, ductility, and toughness in “brittle” materials

2. Strength and fracture of Si micropillars: A new scanning electron microscopy-based micro-compression test

3. Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM

4. Micromechanical fracture strength of silicon

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