Die SF5Ox-Radikale,x=0-3
Author:
Publisher
Wiley
Subject
General Medicine
Reference35 articles.
1. High Voltage Insulation and Arc Interruption in SF6 and Vacuum, Pergamon, Oxford, 1981.
2. Plasma Etching: An Introduction, Academic Press, Boston, 1989.
3. Plasma diagnostics of a SF6radiofrequency discharge used for the etching of silicon
4. Reactive Ion Etching in SF 6 Gas Mixtures
5. Gas-phase reactions in plasmas of SF6 with O2 in He
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