1. Microperipheric Center Technical University of Berlin Gustav-Meyer-Allee 25 13355 Berlin, Germany
2. Faculty of Mechatronics Warsaw University of Technology ul. św. A. Boboli 8 p. 145 02-525 Warsaw Poland
3. System Integration and Interconnection Technologies Fraunhofer-Institute for Reliability and Microintegration (IZM) Gustav-Meyer-Allee 25 13355 Berlin Germany