Approaching the Limits of Aspect Ratio in Free‐Standing Al 2 O 3 3D Shell Structures-Reference-Cited by-同舟云学术

Approaching the Limits of Aspect Ratio in Free‐Standing Al ₂ O ₃ 3D Shell Structures

Published:2022-05-17 Issue:10 Volume:24 Page:2200444
ISSN:1438-1656
Container-title:Advanced Engineering Materials
language:en
Short-container-title:Adv Eng Mater

Author:

Burgmann Stephanie¹,Lid Markus¹,Chaikasetsin Settasit²^ORCID,Bjordal Dag Skjerven¹,Prinz Fritz²^ORCID,Provine John³^ORCID,Berto Filippo¹^ORCID,van Helvoort Antonius T. J.⁴^ORCID,Torgersen Jan⁵^ORCID

Affiliation:

1. Department of Mechanical and Industrial Engineering NTNU Trondheim Norway

2. Department of Mechanical Engineering Stanford University Stanford CA USA

3. Aligned Carbon (Santa Clara, CA) and Department of Electrical Engineering Stanford University

4. Department of Physics NTNU Trondheim Norway

5. Institute for Materials Science Technical University of Munich 85748 Garching b. München Germany

Funder

Norges Forskningsråd

Publisher

Wiley

Subject

Condensed Matter Physics,General Materials Science

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/adem.202200444

Reference48 articles.

1. Novel MEMS-Based Gas-Cell/Heating Specimen Holder Provides Advanced Imaging Capabilities forIn SituReaction Studies

2. Vacuum sealing using atomic layer deposition of Al2O3 at 250 °C

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