1. In Jikken Kagaku Koza 29, Kobunshi Zairyo (in Japanese); The Chemical Society of Japan: Maruzen, Tokyo, 1993; Chapter 10.4, p 477.
2. VLSI Technology; Ed.; McGraw-Hill: New York, 1988; p 233.
3. Glow Discharge Process; Wiley: New York, 1980; p 143.
4. In Low Temperature Plasma for Material Chemistry; Ed.; Sangyo Tosho: Tokyo, 1994; Chapter 3, p 41.
5. In Polymers, Polymer Permeability; Ed.; Elsevier: London, 1985; Chapter 2, p 11.