A robust focusing and astigmatism correction method for the scanning electron microscope-Part II: Autocorrelation-based coarse focusing method-Reference-Cited by-同舟云学术

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A robust focusing and astigmatism correction method for the scanning electron microscope-Part II: Autocorrelation-based coarse focusing method

Published:1998-06 Issue:4 Volume:20 Page:324-334
ISSN:0161-0457
Container-title:Scanning
language:en
Short-container-title:Scanning

Author:

Ong K. H.,Phang J. C. H.,Thong J. T. L.

Publisher

Wiley

Subject

Instrumentation,Atomic and Molecular Physics, and Optics

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/sca.1998.4950200406/fullpdf

Reference11 articles.

1. Automatic focus control of charged particle beams;Dost;IBMJ Res Develop,1968

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Technology for Fundamental Improvement of an Extremely Low-Quality Video Signal for Use in Fine Focusing and Astigmatism Correction in Scanning Electron Microscopy;Scanning;2023-01-25

2. Learning-Based Autofocus for Scanning Electron Microscopy;2022 41st Chinese Control Conference (CCC);2022-07-25

3. Notes and References;Principles of Electron Optics, Volume 4;2022

4. Autofocus on moving object in scanning electron microscope;Ultramicroscopy;2017-11

5. Support system for fine focusing and astigmatism correction using an auditory signal in scanning electron microscopy;Microscopy;2017-02-24

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