Subject
Instrumentation,Atomic and Molecular Physics, and Optics
Reference10 articles.
1. A high-resolution time-dispersive electron spectrometer for fast voltage-contrast measurements;Dinnis;Microelectronic Eng,1996
2. Scanning electron microscope with a single pole-piece lens;Kolarík;Scan Microsc,1989
3. A novel high-resolution scanning microscope for the surface analysis of high-aspect-ratio three-dimension structures;Nakagawa;Jpn J Appl Phys,1991
4. Elimination of third order aberrations in electron beam scanning systems;Ohiwa;Electr Commun Jpn,1977
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献