Synthesis of Diamond-Like Carbon Films Deposited by the Ionization Vapor Method and Development of its Semiconductive Devices Fabricated by the Focused Ga Ion Beam Implantation-Reference-Cited by-同舟云学术

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Synthesis of Diamond-Like Carbon Films Deposited by the Ionization Vapor Method and Development of its Semiconductive Devices Fabricated by the Focused Ga Ion Beam Implantation

Published:2018-02-01 Issue:4 Volume:101 Page:34-41
ISSN:1942-9533
Container-title:Electronics and Communications in Japan
language:en
Short-container-title:Electron Comm Jpn

Author:

KURUMI SATOSHI¹,TAKAHARA YUSUKE¹,OHNO TAKAFUMI¹,MATSUDA KEN-ICHI¹,SUZUKI KAORU¹

Affiliation:

1. Nihon University; Japan

Publisher

Wiley

Subject

Applied Mathematics,Electrical and Electronic Engineering,Computer Networks and Communications,General Physics and Astronomy,Signal Processing

Reference21 articles.

1. Effects of main buffer layer on crystallographic structure and on electrical and optical properties of GaN and Ga1-xAlxN (0 < x ≤ 0.4) films grown on sapphire substrate by MOVPE;Akasaki;J Cryst Growth,1989

2. High-power InGaN/GaN double-heterostructure violet light emitting diodes;Nakamura;Appl Phys Lett,1993

3. High-brightness InGaN/AlGaN double-heterostructure blue-green-light-emitting diodes;Nakamura;J Appl Phys,1994

4. Heteroepitaxial growth of β-SiC on silicon substrate using SiC14-C3H8-H2 system;Matsunami;J Cryst Growth,1978

5. High-voltage (>1 kV) SiC Schottky barrier diodes with low on-resistances;Kimoto;IEEE Electr Device L,1993

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