High‐Aspect‐Ratio Imageable Top‐Surface Lithography Using UV‐Assisted Inkless Contact Printing
Author:
Affiliation:
1. Minuta Tech. Co., Ltd. R&D Center Seongnam, Gyeonggi‐Do 513‐15 (Korea)
2. Semiconductor Division, Samsung Electronics Corporation Yougin, Gyeonggi‐Do 446‐711 (Korea)
Publisher
Wiley
Subject
Biomaterials,Biotechnology,General Materials Science,General Chemistry
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/smll.200902073
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