1. Laboratory of Process Engineering NeptunLab Department of Microsystems Engineering (IMTEK) University of Freiburg 79110 Freiburg Germany
2. Institute for Applied Materials (IAM) Karlsruhe Institute of Technology (KIT) 76131 Karlsruhe Germany
3. Freiburg Materials Research Center (FMF) University of Freiburg 79104 Freiburg Germany
4. Glassomer GmbH In den Kirchenmatten 54 79110 Freiburg Germany