ε ‐Ga 2 O 3 : An Emerging Wide Bandgap Piezoelectric Semiconductor for Application in Radio Frequency Resonators

Author:

Chen Zimin12ORCID,Lu Xing12,Tu Yujia1,Chen Weiqu1,Zhang Zhipeng1,Cheng Shengliang1,Chen Shujian1,Luo Hongtai1,He Zhiyuan3,Pei Yanli12,Wang Gang124

Affiliation:

1. School of Electronics and Information Technology Sun Yat‐Sen University Guangzhou 510006 China

2. State Key Laboratory of Optoelectronic Materials and Technologies Sun Yat‐Sen University HEMC Guangzhou 510006 China

3. Science and Technology on Reliability Physics and Application of Electronic Component Laboratory No.5 Electronics Research Institute of the Ministry of Industry and Information Technology Guangzhou 510610 China

4. Foshan Institute of Sun Yat‐Sen University Foshan 528225 China

Funder

National Natural Science Foundation of China

Publisher

Wiley

Subject

General Physics and Astronomy,General Engineering,Biochemistry, Genetics and Molecular Biology (miscellaneous),General Materials Science,General Chemical Engineering,Medicine (miscellaneous)

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