1. School of Physics & Photoelectric Engineering Guangdong University of Technology Guangzhou 510650 China
2. Guangdong-Hong Kong-Macao Joint Laboratory for Intelligent Micro-Nano Optoelectronic Technology School of Physics and Optoelectronic Engineering Foshan University Foshan 528000 China
3. National Key Laboratory of Science and Technology on Micro/Nano Fabrication Institute of Microelectronics School of Electronics Engineering and Computer Science Peking University Beijing 100871 P. R. China
4. Institute of Energy Materials Science (IEMS) University of Shanghai for Science and Technology Shanghai 200093 China
5. Nanjing kLIGHT Laser Technology Co. Ltd. Nanjing Jiangsu 210032 China