Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Reference14 articles.
1. : Chemische Dampfablagerung (CVD-Grundlagen für die Mikroelektronik), Berlin 1982;
2. Basic steps and layer homogeneity in CVD (I)
3. Proceedings 31. Internat. Wiss. Kolloqu. TH Ilmenau 1984 H. 5 p. 39 (III);
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