Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Reference11 articles.
1. : Chemische Dampfablagerung (CVD-Grundlagen für die Mikroelektronik), Berlin 1982;
2. CVD Processes with Direct and Indirect Incorporation
3. Simplified Treatment of Transient Doping Behaviour in CVD(I)
4. : Semiconductor Silicon (ed. HUFF, H. R., BURGESS, R. R.), Princeton 1973, p. 213
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