Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Reference48 articles.
1. Role of oxygen in surface segregation of metal impurities in silicon poly-and bicrystals
2. Models for computer simulation of complete IC fabrication process
3. : Final Report Martin Marietta Corporation MCR-76-464; Study of SEM Induced Current and Voltage Contrast Modes to Asses Semicond. Reliability (1976) 83 pages
4. : Research report, Einsatz der REM-EBIC-Technik zur Defekt- und Strukturcharakterisierung von MOS-Bauelementen der Kurzkanaltechnologie; IFE Halle (Saale) 1984
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