Author:
Petrov V. I.,Gvozdover R. S.
Subject
Instrumentation,Atomic and Molecular Physics, and Optics
Reference11 articles.
1. Determination of certain parameters of semiconductor materials and devices by an electron-probe method;Ditsman;Bull Acad Sci USSR Phys Ser (USA),1978
2. On the analysis of diffusion length measurments by SEM;Donolato;Solid-State Electr,1982
3. On the investigation of dopant boundaries in silicon device structures by means of SEM-EBIC;Hoppe;Cryst Res Technol,1989
4. Charge collection scanning electron microscopy;Leamy;J Appl Phys,1982
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