Comparison of AES analyses of transition-metal nitride coatings with carrier-gas heat extraction analyses-Reference-Cited by-同舟云学术

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Comparison of AES analyses of transition-metal nitride coatings with carrier-gas heat extraction analyses

Published:1990-07 Issue:1-12 Volume:16 Page:540-545
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf. Interface Anal.

Author:

Jehn Hermann A.,Grallath Erhard,Strydom I. LeRoux,Hofmann Siegfried

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference19 articles.

1. in Surface Modification Technologies, ed. by and p. 121. TMS-AIME, Warrendale, PA (1988).

2. and (eds), Practical Surface Analysis by AES and XPS. Wiley, Chichester (1983).

3. Characterization of nitride coatings by Auger electron spectroscopy and x‐ray photoelectron spectroscopy

4. The chemical analysis of TiN films: A round robin experiment

5. A correlation of Auger electron spectroscopy, x‐ray photoelectron spectroscopy, and Rutherford backscattering spectrometry measurements on sputter‐deposited titanium nitride thin films

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1. Quantitative Auger electron spectroscopy in thin film depth profiling;Vacuum;1997-09

2. Instrumental Techniques for the Surface Analysis of Materials;Transactions of the IMF;1996-01

3. Deposition and properties of Mo–N films;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1995-11

4. The interactions among the multilayer;Thin Solid Films;1995-05

5. Surface and Interface Analysis of Coatings and Thin Films;Surface Engineering;1994

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