Quantitative Auger electron spectroscopy in thin film depth profiling
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference33 articles.
1. Auger and X-ray photoelectron spectroscopy;Briggs,1990
2. High resolution digital Auger database of true spectra for Auger electron spectroscopy intensities
3. Calculations of electron inelastic mean free paths. III. Data for 15 inorganic compounds over the 50-2000 eV range
4. Compositional depth profiling by sputtering
5. Atomic mixing, surface roughness and information depth in high-resolution AES depth profiling of a GaAs/AlAs superlattice structure
Cited by 14 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Experimental shift allowance in the deconvolution of SIMS depth profiles;Surface and Interface Analysis;2013-03-25
2. MCsn+-SIMS: An Innovative Approach for Direct Compositional Analysis of Materials without Standards;Energy Procedia;2013
3. Quantitative Compositional Depth Profiling;Springer Series in Surface Sciences;2012-06-01
4. Quantitative analysis of chemical compositions in ultra-thin oxide–nitride–oxide stacked films having wet oxidized blocking layer;Thin Solid Films;2007-06
5. Analytical electron microscopy and Auger electron spectroscopy study of low-temperature diffusion in multilayer chromium–copper–nickel–gold thin films;Thin Solid Films;2003-11
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3