Influence of ion mixing, ion beam-induced roughness and temperature on the depth resolution of sputter depth profiling of metallic bilayer interfaces-Reference-Cited by-同舟云学术

Influence of ion mixing, ion beam-induced roughness and temperature on the depth resolution of sputter depth profiling of metallic bilayer interfaces

Author:

Cirlin Eun-Hee,Cheng Yang-Tse,Ireland Philip,Clemens Bruce

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference63 articles.

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3. and Fundamentals of Surface and Thin Film Analysis, North-Holland, New York (1986).

4. Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy, ed. by and pp. 141-179. Wiley, New York (1983).

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