Improved depth resolution of AES in-depth profiling
Author:
Publisher
Wiley
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference9 articles.
1. Yearbook 86/87 of the Research Institute for Technical Physics, p. 86, Research Institute for Technical Physics, Budapest (1987).
2. Practical surface analysis: state of the art and recent developments in AES, XPS, ISS and SIMS
3. Improved depth resolution by sample rotation during Auger electron spectroscopy depth profiling
4. Improved sputter-depth profiles using two ion guns
5. Limitations of ion etching for interface analysis
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