American society for testing and materials. Standard guide for depth profiling in auger electron spectroscopy (E1127-91)

Author:

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference32 articles.

1. Optimized depth resolution in ion-sputtered and lapped compositional profiles with Auger electron spectroscopy

2. and “Thin film Analysis: from 'Sputter Profiles to ‘Depth Profiles’ by combined Auger/X-ray Analysis” Proceedings of the 7th International Vacuum Congress and 3rd international Conference on Solid Surfaces, Vinenna, 1977, pp. 2213-2216.

3. Si(111)7×7 and Si(111)√3¯×√3¯-al surface-structure analysis by ion-induced Auger-electron spectroscopy

4. Quantitative Detection of Oxygen in Silicon Nitride on Silicon

5. “Composition-Depth Profiling Using Auger Electron spectroscopy” Matal Science, Vol. 17, 1983, pp. 357-367.

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