Insights into the Atmospheric Pressure Plasma-Enhanced Chemical Vapor Deposition of Thin Films from Methyldisiloxane Precursors
Author:
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/ppap.201100157/fullpdf
Reference32 articles.
1. Plasma-Polymerized Organosilicones and Organometallics
2. Plasma‐Enhanced Chemical Vapor Deposition of Organosilicon Thin Films from Tetraethoxysilane‐Oxygen Feeds
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4. Deposition of SiOx films from O2/HMDSO plasmas
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