Observation of Bi-Maxwellian Distributions in a H2 Plasma Produced by a Narrow Gap VHF Discharge-Reference-Cited by-同舟云学术

Observation of Bi-Maxwellian Distributions in a H2 Plasma Produced by a Narrow Gap VHF Discharge

Published:2015-12-02 Issue:6 Volume:13 Page:584-587
ISSN:1612-8850
Container-title:Plasma Processes and Polymers
language:en
Short-container-title:Plasma Process. Polym.

Author:

Chen Kuan-Chen¹,Chiu Kuo-Feng¹,Chen Chia-Fu²,Lien Cheng-Yang¹,Tsai Yu-Jer³,Lien Ting-Kuei⁴,Matsunaga Fumihiko⁵,Tanaka Masaaki⁵,Ogiwara Kohei⁶,Uchino Kiichiro⁶,Kawai Yoshinobu¹⁶

Affiliation:

1. Department of Materials Science and Engineering; Feng Chia University; Taichung 40724 Taiwan

2. Department of Electronic Engineering; Feng Chia University; Taichung 40724 Taiwan

3. ULVAC Taiwan Inc.; Hsinchu 30078 Taiwan

4. Helius Power Corp. Ltd.; Taichung 42881 Taiwan

5. PEGASUS Software Inc.; Tokyo 104-0032 Japan

6. Interdisciplinary Grauate School of Engineering Sciences; Kyushu University; Kasuga Fukuoka 816-8580 Japan

Funder

National Science Council, Taiwan

Publisher

Wiley

Subject

Polymers and Plastics,Condensed Matter Physics

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/ppap.201500183/fullpdf

Reference18 articles.

1. Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz

2. Probe diagnostics of non‐Maxwellian plasmas

3. Principles of Plasma Discharges and Materials Processing

4. Structure observed in measured electron energy distribution functions in capacitively coupled radio frequency hydrogen plasmas

5. Electron heating mode transition observed in a very high frequency capacitive discharge

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Study of spatial profiles of capacitively coupled VHF H2plasma by simulation;Japanese Journal of Applied Physics;2016-11-09

2. Corrigendum on: Observation of Bi-Maxwellian Distributions in a H2 Plasma Produced by a Narrow Gap VHF Discharge;Plasma Processes and Polymers;2016-03-16