Deposition of Copper Oxide Coatings With an Atmospheric Pressure Plasma Source: I − Characterization of the Plasma-Reference-Cited by-同舟云学术

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Deposition of Copper Oxide Coatings With an Atmospheric Pressure Plasma Source: I − Characterization of the Plasma

Published:2016-07-21 Issue:9 Volume:13 Page:946-954
ISSN:1612-8850
Container-title:Plasma Processes and Polymers
language:en
Short-container-title:Plasma Process. Polym.

Author:

Gruenwald Johannes¹,Fricke Katja¹,Fröhlich Maik¹,Polak Martin¹

Affiliation:

1. Leibniz Institute for Plasma Science and Technology (INP); Felix-Hausdorff-Str. 2 Greifswald 17489 Germany

Funder

European Union Seventh Framework Program

Publisher

Wiley

Subject

Polymers and Plastics,Condensed Matter Physics

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/ppap.201600046/fullpdf

Reference29 articles.

1. Engineering of Composite Organosilicon Thin Films with Embedded Silver Nanoparticles via Atmospheric Pressure Plasma Process for Antibacterial Activity

2. Synthesis of Copper Particles by Non-thermal Atmospheric Pressure Plasma Jet

3. Low Temperature Deposition of Cu Thin Film on Polyimide Using RF-driven Atmospheric Pressure Plasma Jet in Nitrogen Atmosphere

4. Characteristics of high-purity Cu thin films deposited on polyimide by radio-frequency Ar/H2 atmospheric-pressure plasma jet

5. Copper deposition by electron cyclotron resonance plasma

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Applications of DBD plasma jets in the advanced nanomaterials and COVID-19 pandemic;Plasma at the Nanoscale;2022

2. Thin‐film deposition by combining plasma jet with spark discharge source at atmospheric pressure;Contributions to Plasma Physics;2020-11-09

3. Room-temperature, atmospheric-pressure microsputtering of dense, electrically conductive, sub-100 nm gold films;Nanotechnology;2019-04-24

4. Pressure as an additional control handle for non-thermal atmospheric plasma processes;Plasma Processes and Polymers;2017-06-07

5. Deposition of Copper Oxide Coatings with an Atmospheric Pressure Plasma Source: II - Characterization of the Films;Plasma Processes and Polymers;2016-07-14

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