Synthesis of Few-Layer Graphene-on-Insulator Films by Controllable C4F8Plasma Etching SiC-Reference-Cited by-同舟云学术

Synthesis of Few-Layer Graphene-on-Insulator Films by Controllable C4F8Plasma Etching SiC

Published:2015-03-25 Issue:10 Volume:12 Page:1061-1068
ISSN:1612-8850
Container-title:Plasma Processes and Polymers
language:en
Short-container-title:Plasma Process. Polym.

Author:

Jin Chenggang¹²,Huang Tianyuan¹²,Yang Yan¹²,Wu Mingzhi¹²,Xu Yijun¹²,Wu Zhaofeng³,Zhuge Lanjian⁴,Wu Xuemei¹²⁵,Ye Chao¹²

Affiliation:

1. College of Physics; Optoelectronics and Energy & Collaborative Innovation Center of Suzhou Nano Science and Technology; Soochow University; Suzhou 215006 China

2. Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province & Key Lab of Modern Optical Technologies of Education Ministry of China; Soochow University; Suzhou 215006 China

3. Yancheng Institute of Technology; Yancheng 224003 China

4. Analysis and Testing Center; Soochow University; Suzhou 215123 China

5. State Key Laboratory of Functional Materials for Informatics; Shanghai Institute of Microsystem and Information Technology; Chinese Academy of Sciences; 865 Changning Road Shanghai 200050 China

Funder

National Natural Science Foundation of China

National Magnetic Confinement Fusion Science Program of China under Contracts

Priority Academic Program Development of Jiangsu Higher Education Institutions (PAPD)

Key University Science Research Project of Jiangsu Province

Natural Science Foundation of Jiangsu Province for the Higher Education Institutions

Qing Lan Project

Publisher

Wiley

Subject

Polymers and Plastics,Condensed Matter Physics

Reference34 articles.