Affiliation:
1. National Institute of Standards and Technology; Gaithersburg, Maryland
Subject
Instrumentation,Atomic and Molecular Physics, and Optics
Reference21 articles.
1. Why horizontal field width;Boyde;Scanning,1979
2. SEM sentinel-SEM performance measurement system;Damazo;Proc SPIE,2001
3. Practical Scanning Electron Microscopy
4. Sub-micrometer length metrology: problems, techniques and solutions;Jensen;Scan Electron Microsc,1980
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