Au‐Free Ohmic Contacts and Their Impact on Sub‐Contact Charge Carrier Concentration in AlGaN/GaN Heterostructures-Reference-Cited by-同舟云学术

Au‐Free Ohmic Contacts and Their Impact on Sub‐Contact Charge Carrier Concentration in AlGaN/GaN Heterostructures

Published:2021-11-16 Issue: Volume: Page:2100312
ISSN:0370-1972
Container-title:physica status solidi (b)
language:en
Short-container-title:Physica Status Solidi (b)

Author:

Garbe Valentin¹^ORCID,Schmid Alexander¹,Seidel Sarah¹^ORCID,Abendroth Barbara²^ORCID,Stöcker Hartmut²^ORCID,Doering Philipp³^ORCID,Meyer Dirk C.²,Heitmann Johannes¹

Affiliation:

1. Institute of Applied Physics (IAP) TU Bergakademie Freiberg Leipziger Str. 23 Freiberg 09599 Germany

2. Institute of Experimental Physics (IEP) TU Bergakademie Freiberg Leipziger Str. 23 Freiberg 09599 Germany

3. Department of Sustainable Systems Engineering (INATECH) University of Freiburg Emmy‐Noether‐Str. 2 Freiburg 79108 Germany

Funder

Bundesministerium für Bildung und Forschung

Publisher

Wiley

Subject

Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/pssb.202100312

Reference30 articles.

1. Ohmic contacts to Gallium Nitride materials

2. Au-free low temperature ohmic contacts for AlGaN/GaN power devices on 200 mm Si substrates

3. Structural and electrical studies on Ti/Al-based Au-free ohmic contact metallization for AlGaN/GaN HEMTs

4. Mechanism of Ti/Al/Ti/W Au-free ohmic contacts to AlGaN/GaN heterostructures via pre-ohmic recess etching and low temperature annealing

5. Improved Device Performance in AlGaN/GaN HEMT by Forming Ohmic Contact With Laser Annealing

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1. Low-field transport properties and scattering mechanisms of degenerate n-GaN by sputtering from a liquid Ga target;Applied Physics Express;2024-03-01

2. Ultra-low resistance Au-free V/Al/Ti/TiN ohmic contacts for AlGaN/GaN HEMTs;Applied Physics Letters;2023-11-13

3. Au‐Free Ohmic Contact for GaN High‐Electron‐Mobility Transistors;physica status solidi (a);2022-03-02