Pressure cycling for purging of dead spaces in high-purity gas delivery systems-Reference-Cited by-同舟云学术

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Pressure cycling for purging of dead spaces in high-purity gas delivery systems

Published:2015-06-16 Issue:11 Volume:61 Page:3973-3980
ISSN:0001-1541
Container-title:AIChE Journal
language:en
Short-container-title:AIChE J.

Author:

Kishore Jivaan¹,Shadman Farhang¹,Dittler Roy²,Carl Geisert³

Affiliation:

1. Dept. of Chemical and Environmental Engineering; University of Arizona; Tucson AZ 85721

2. Substrate Packaging Technology Development (SPTD); Intel Corporation; Chandler AZ 85248

3. Arizona Fab/Sort Manufacturing (AzFSM); Intel Corporation; Chandler AZ 85248

Funder

Intel Corporation

Tiger Optics, LLC

SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing at the University of Arizona

Publisher

Wiley

Subject

General Chemical Engineering,Environmental Engineering,Biotechnology

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/aic.14890/fullpdf

Reference25 articles.

1. Desorption of moisture from stainless steel tubes and alumina filters in high purity gas distribution systems;Haider;IEEE Trans Compon Hybrids Manufact Technol.,1991

2. Trace moisture adsorption onto various stainless steel surface-investigation of adsorption heat and adsorption isotherms;Ishihara;Hyomen Kagaku.,1997

3. Moisture drydown in ultra-high-purity oxygen systems;Ma;J IEST.,1998

4. Shadman F Shero E Ma C Institute Of Environmental Sciences And Technology 1995 542 548

5. Evaluating electronics-grade gas-line purging requirements;Pearlstein;Solid State Technol.,2001

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Optimization of cleaning process in semiconductor gas delivery system by computational fluid dynamics simulation;Process Safety and Environmental Protection;2024-11

2. Kinetics of Pressure Cycling Extraction of Solute from Leaves of Mate (Ilex paraguariensis) Dispersed in Water;Chemical Engineering Communications;2016-12-27

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