ChemInform Abstract: Formation of Silicon Nitride Film by Plasma Decomposition of Methylsilazane.
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Published:2010-08-17
Issue:40
Volume:26
Page:no-no
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ISSN:0931-7597
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Container-title:ChemInform
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language:en
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Short-container-title:ChemInform
Author:
MORIWAKI T.,MATSUMOTO O.