1. Forschungszentrum Jülich GmbH Helmholtz‐Institute Erlangen‐Nürnberg for Renewable Energy (IEK‐11) Egerlandstr. 3 Erlangen 91058 Germany
2. Department of Chemical and Biological Engineering Friedrich‐Alexander‐University Erlangen‐Nürnberg Egerlandstr. 3 Erlangen 91058 Germany
3. IMTEK Department of Microsystems Engineering Laboratory for MEMS Applications University of Freiburg Georges‐Koehler‐Allee 103 Freiburg 79110 Germany
4. Siemens AG Erlangen Gas and Power Günther‐Scharowsky‐Str. 1 Erlangen 91058 Germany