Automated data mining of secondary ion mass spectrometry spectra
Author:
Affiliation:
1. Department of Chemical Sciences; University of Catania and CSGI; Catania Italy
Publisher
Wiley
Subject
Applied Mathematics,Analytical Chemistry
Reference23 articles.
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3. ToF-SIMS imaging of Cl at Cu grain boundaries in interconnects for microelectronics;Barnes;Appl Surf Sci,2008
4. Improving secondary ion mass spectrometry C60 n+ sputter depth profiling of challenging polymers with nitric oxide gas dosing;Havelund;Anal Chem,2013
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