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Reduction in Modulus of Suspended Sub-2 nm Single Crystalline Silicon Nanomembranes

  • Published:2017-07-20 Issue:19 Volume:4 Page:1700529
  • ISSN:2196-7350
  • Container-title:Advanced Materials Interfaces
  • language:en
  • Short-container-title:Adv. Mater. Interfaces

Author:

Zhu Xiaodong12,Lu Jiwu3,Pan Haihua4,Zheng Zejie1,Pi Xiaodong2,Zhao Yi12

Affiliation:

1. College of Information Science and Electronic Engineering; Zhejiang University; Hangzhou 310027 China

2. State Key Laboratory of Silicon Materials; Zhejiang University; Hangzhou 310027 China

3. College of Electrical and Information Engineering; Hunan University; Changsha 410082 China

4. Qiushi Academy for Advanced Studies; Zhejiang University; Hangzhou 310027 China

Funder

National Natural Science Foundation of China

Fundamental Research Funds for the Central Universities

Natural Science Foundation of Zhejiang Province

Publisher

Wiley

Subject

Mechanical Engineering,Mechanics of Materials

Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Young's Modulus Characterization of Nano‐Level Silicon Nanomembrane;physica status solidi (RRL) – Rapid Research Letters;2023-11-16

2. Ultra‐Thin Flexible Encapsulating Materials for Soft Bio‐Integrated Electronics;Advanced Science;2022-08-28

3. Focussed helium ion channeling through Si nanomembranes;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2018-03

4. Silicon Nanomembranes with Hybrid Crystal Orientations and Strain States;ACS Applied Materials & Interfaces;2017-11-27
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