1. Electron Devices (LEB)Department of Electrical, Electronic and Communication EngineeringFriedrich‐Alexander University Erlangen‐Nürnberg Cauerstraße 6 91058 Erlangen Germany
2. Fraunhofer Institute for Integrated Systems and Device Technology (IISB) Schottkystraße 10 91058 Erlangen Germany
3. Institute of Micro‐ and Nanostructure Research (IMN) and Center for Nanoanalysis and Electron Microscopy (CENEM)Department of Materials Science and EngineeringFriedrich‐Alexander University Erlangen‐Nürnberg Cauerstraße 3 91058 Erlangen Germany