Formation of nanoporous poly(methyl silsesquioxane) thin films using adamantane for low-k application
Author:
Publisher
Wiley
Subject
Materials Chemistry,Polymers and Plastics,Surfaces, Coatings and Films,General Chemistry
Reference28 articles.
1. Silsesquioxanes
2. Low-k Interlayer Dielectric Materials: Synthesis and Properties of Alkoxy-Functional Silsesquioxanes
3. A Novel Photocrosslinkable Polyhedral Oligomeric Silsesquioxane and Its Nanocomposites with Poly(vinyl cinnamate)
4. Inorganic/Organic Hybrid Nanoreactors Based on Cyclic and Cubic Siloxane Scaffolds
5. Synthesis and Characterization of Templating Low Dielectric Constant Organosilicate Films
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