Flow and temperature patterns in an inductively coupled plasma reactor: Experimental measurements and CFD simulations-Reference-Cited by-同舟云学术

Flow and temperature patterns in an inductively coupled plasma reactor: Experimental measurements and CFD simulations

Author:

Punjabi Sangeeta B.¹²,Sahasrabudhe Sunil N.³,Ghorui S.³,Das A. K.³,Joshi Narendra K.⁴,Kothari Dushyant C.²,Ganguli Arijit A.⁵,Joshi Jyeshtharaj B.⁵⁶

Affiliation:

1. Electrical Engineering Dept.; V.J.T.I; Matunga Mumbai 400019 India

2. Dept. of Physics; University of Mumbai; Kalina 400098 India

3. Laser and Plasma Technology Division; BARC Mumbai 400085 India

4. Dept. of Nuclear Science and Technology; Modi University of Science and Technology; Lakshamnagarh (Sikar)−332311 India

5. Dept. of Chemical Engineering; Institute of Chemical Technology; Matunga Mumbai 400019 India

6. Homi Bhabha National Institute; Anushaktinagar Mumbai 400094 India

Publisher

Wiley

Subject

General Chemical Engineering,Environmental Engineering,Biotechnology

Reference45 articles.

5. Abatement of perfluorocarbons with an inductively coupled plasma reactor;Liao;J Vac Sci Technol.,1999

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