Electromagnetic silicon MEMS resonator-Reference-Cited by-同舟云学术

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Electromagnetic silicon MEMS resonator

Published:2019-01 Issue:2 Volume:206 Page:54-60
ISSN:0424-7760
Container-title:Electrical Engineering in Japan
language:en
Short-container-title:Electr Eng Jpn

Author:

Watanabe Yoshiyuki¹,Yahagi Toru¹,Abe Yutaka¹,Murayama Hiroki¹

Affiliation:

1. Yamagata Research Institute of Technology; Division of Electronics and Information System

Publisher

Wiley

Subject

Electrical and Electronic Engineering,Energy Engineering and Power Technology

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/eej.23154/fullpdf

Reference13 articles.

1. Quartz crystal microbalance;Seo;J Surf Finish Soc Jpn,1994

2. Application of the smart sensors using quartz crystal microbalance;Noda;IEEJ Trans E,2015

3. Quartz Crystal Microbalance (QCM) Sensor for NH3 Gas with the Compensation of the Humidity Drift;Ushim;IEEJ Trans E,2013

4. A CO2 sensor using a quartz crystal microbalance coated with a sensitive membrane;Muraoka;IEEJ Trans E,2013

5. Intrinsic safety for wireless hydrogen gas sensor;Hayashi;Transact SICE,2016

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1. A Novel Fault-Tolerant Super-Twisting Control Technique for Chaos Stabilization in Fractional-Order Arch MEMS Resonators;Mathematics;2023-05-13

2. Advances in Marine Self-Powered Vibration Sensor Based on Triboelectric Nanogenerator;Journal of Marine Science and Engineering;2022-09-22

3. Controllable Fabrication and Mechanism of Macropores Formation on p-Type Silicon;Russian Journal of Physical Chemistry A;2020-08

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