A conformal mapping-based approach for fast two-dimensional FEM electrostatic analysis of MEMS devices
Author:
Publisher
Wiley
Subject
Electrical and Electronic Engineering,Computer Science Applications,Modelling and Simulation
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/jnm.770/fullpdf
Reference21 articles.
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2. MEMS for wireless communications: ‘from RF-MEMS components to RF-MEMS-SIP’;Tillmans;Journal of Micromechanics and Microengineering,2003
3. A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches;van Spengen;Journal of Micromechanics and Microengineering,2004
4. A computer-aided design system for microelectromechanical systems (MEMCAD);Senturia;Journal of Microelectromechanical systems,1992
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