Manufacturing Graphene-Encapsulated Copper Particles by Chemical Vapor Deposition in a Cold Wall Reactor

Author:

Chen Shujing1,Zehri Abdelhafid2,Wang Qianlong3,Yuan Guangjie1,Liu Xiaohua4,Wang Nan5,Liu Johan12

Affiliation:

1. SMIT Center School of Mechatronic Engineering and Automation; Shanghai University; 20 Chengzhong Rd. Shanghai 201800 China

2. Electronics Materials and Systems Laboratory Department of Microtechnology and Nanoscience; Chalmers University of Technology; Kemivägen 9 SE-412 96 Göteborg Sweden

3. Shenzhen Institute of Advanced Graphene Application and Technology (SIAGAT); Shenzhen 518106 China

4. Shanghai Shang Da Ruihu Microsystem Integration Technology Co. Ltd. Room 203, Building 2, No 1919; Fengxiang Road Baoshan District Shanghai 200444 China

5. SHT Smart High Tech AB Hugo Grauers Gatan 3A; SE-411 33 Göteborg Sweden

Funder

Ministry of Science and Technology of China

Swedish Foundation for Strategic Research

Production Area of Advance at Chalmers University of Technology, Sweden

Publisher

Wiley

Subject

General Chemistry

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