1. SMIT Center School of Mechatronic Engineering and Automation; Shanghai University; 20 Chengzhong Rd. Shanghai 201800 China
2. Electronics Materials and Systems Laboratory Department of Microtechnology and Nanoscience; Chalmers University of Technology; Kemivägen 9 SE-412 96 Göteborg Sweden
3. Shenzhen Institute of Advanced Graphene Application and Technology (SIAGAT); Shenzhen 518106 China
4. Shanghai Shang Da Ruihu Microsystem Integration Technology Co. Ltd. Room 203, Building 2, No 1919; Fengxiang Road Baoshan District Shanghai 200444 China
5. SHT Smart High Tech AB Hugo Grauers Gatan 3A; SE-411 33 Göteborg Sweden