Microscopic research on the properties of optothermal microactuators with different lever ratios-Reference-Cited by-同舟云学术

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Microscopic research on the properties of optothermal microactuators with different lever ratios

Published:2020-01-07 Issue:5 Volume:83 Page:464-471
ISSN:1059-910X
Container-title:Microscopy Research and Technique
language:en
Short-container-title:Microsc Res Tech

Author:

Zhang Ziyao¹^ORCID,Wang Yingda¹^ORCID,You Qingyang¹,Zhang Haijun¹

Affiliation:

1. State Key Laboratory of Modern Optical InstrumentationCollege of Optical Science and Engineering, Zhejiang University Hangzhou China

Funder

National Natural Science Foundation of China

Publisher

Wiley

Subject

Medical Laboratory Technology,Instrumentation,Histology,Anatomy

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/jemt.23434

Reference22 articles.

1. MEMS actuators and sensors: observations on their performance and selection for purpose

2. Average power control and positioning of polysilicon thermal actuators

3. Finite element modeling of piezoelectric sensors and actuators

4. Precision bi-directional motion of a linear mechanical shuttle with an electrothermal microengine

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Plasmon-enhanced photoacoustic oscillation for micro laser motor actuation;APL Photonics;2023-09-01

2. Micro blanking processing method actuated by piezoelectric ceramic;Materials Today Communications;2021-12

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