The study on the atomic force microscopy base nanoscale electrical discharge machining

Author:

Huang Jen-Ching1,Chen Chung-Ming2

Affiliation:

1. Department of Mechanical Engineering; Tungnan University; ShenKeng New Taipei City Taiwan

2. Institute of Mechatronics Engineering; Tungnan University; ShenKeng, New Taipei City Taiwan

Publisher

Wiley

Subject

Instrumentation,Atomic and Molecular Physics, and Optics

Reference17 articles.

1. Tip sharping by normal and reverse electrochemical etching;Fotion;Rev Sci Instr,1993

2. State of the art electrical discharge machining (EDM);Ho;Int J Mach Tool Manuf,2003

3. Fabricating nanostructure by atomic force microscopy;Huang;Jpn J Appl Phys,2009

4. The influence of the bias type, doping condition and pattern geometry on AFM tip-induced local oxidation;Huang;J Chin Inst Eng,2010

5. Evaluation of the nanofabrication and corrosion on copper by in-situ ECAFM;Huang;J Chin Soc Mech Eng,2011

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