The study of nanoscratch and nanomachining on hard multilayer thin films using atomic force microscope
Author:
Affiliation:
1. Research Center for Micro/Nanotechnology; Tungnan University; New Taipei City; Taiwan
2. Department of Materials Engineering; Mingchi University of Technology; New Taipei City; Taiwan
Publisher
Wiley
Subject
Instrumentation,Atomic and Molecular Physics, and Optics
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